串联臂压电微电机驱动机理的研究  

Research on the Driving Mechanism of a Piezoelectric Micromotor Driven by Serial Bending Arms

作　　者：梁克平[1] 邵培革[1] 杨敬涵[1] 王立鼎[1] 

机构地区：[1]大连理工大学机械工程学院

出　　处：《中国机械工程》2002年第6期524-525,共2页China Mechanical Engineering

基　　金：国家自然科学基金资助项目 (5 9875 0 0 9)

摘　　要：二级串联压电双晶片 (串联臂 )一端固定时 ,在特定的电信号控制下 ,自由端将沿椭圆轨迹运动。以串联臂为驱动元件 ,可用来驱动端面与其相接触的转子转动 ,构成串联臂压电微电机。研究了串联弯曲臂压电微电机的工作原理 。Driven by the special signals,the free end of a cantilever (named as serial bending arm) composed of two serial piezoelectric bimorphs will move along an elliptic track.When the cantilever is used to drive a cylinder rotor,of which the end surface contacts the free end of the cantilever,the rotor will rotate.Thus a micromotor driven by cantilevers composed of serial piezoelectric bimorphs can be built.In this paper,the working principle of the piezoelectric micromotor driven by serial bending arms is proposed and its construction is conceived.

关 键 词：压电微电机 串联弯曲臂 工作原理 结构 MEMS 

分 类 号：TM383.6[电气工程—电机] TH－39[机械工程]