无机盐先驱体溶胶-凝胶法制备Al_2O_3薄膜的研究  

Preparation of Al_2O_3 Film by Sol-gel Method Using Inorganic Salt as Precursors

作　　者：张勤俭[1] 张建华[2] 李敏[3] 张勤河[2] 毕进子[2] 张代林[2] 任升峰[2] 胡玉景[2] 

机构地区：[1]北京市电加工研究所,北京100083 [2]山东大学机械工程学院,山东济南250061 [3]国家电力公司电力建设研究所,北京100055

出　　处：《机械工程材料》2002年第3期17-19,共3页Materials For Mechanical Engineering

基　　金：国家自然科学基金资助项目 (5 0 0 75 0 48)

摘　　要：用无机盐先驱体 ,溶胶 凝胶工艺在氧化铝基工程陶瓷上成功制备了Al2 O3薄膜。用差热分析 (DTA)、扫描电子显微镜 (SEM )、X射线衍射 (XRD)、二次离子质谱 (SIMS)等手段对Al2 O3薄膜的物相组成、表面和断面形貌及界面结构进行了分析。结果表明 :制备的薄膜完整 ,内部无明显的宏观缺陷 ;Al2 O3晶粒均匀 ,主要物相为α Al2 O3;基体中的元素在薄膜中有明显的扩散 ,有助于提高界面结合强度。Al 2O 3 film was prepared on alumina based engineering ceramics using inorganic salt as precursors. The phase composition, morphology of surface and cross section and interface structure were analyzed by SEM, XRD and Secondary Ion Mass Spectrometry (SIMS). It was found that the coating was free of crack and distinct flaws in it. Al 2O 3 crystal grains were homogeneous and mainly composed of α Al 2O 3 after heat treatment at 1100℃ for 1h. The diffusion of Ti, C, W of the substrate into the film improved the adhesion strength of the interface.

关 键 词：无机盐先驱体 溶胶-凝胶法 薄膜 界面 制备 氧化铝陶瓷 陶瓷膜 

分 类 号：TQ174.758[化学工程—陶瓷工业]