XPS中Tougaard法本底扣除初探  

Preliminary Exploration of Touggard's Method Used for the Background Subtraction in XPS

作　　者：龚海宁[1] 申华[1] 黄惠忠[1] 吴念祖[1] 

机构地区：[1]北京大学物理化学研究所

出　　处：《物理化学学报》2002年第4期326-331,共6页Acta Physico-Chimica Sinica

基　　金：国家自然科学基金委(29733080);"九五"重点项目资助

摘　　要：介绍了XPS(X-rayphotoelectronspectroscopy)谱图中本底产生的机理以及Tougaard法本底扣除原理的简略推导过程,提出了可供编程的约化形式,使用VC语言编写程序试对不同样品(含金属、过渡金属及非金属)的谱图进行本底扣除,并与Shirley法、直线法本底扣除进行准确性的比较,提出了Tougaard方法试用于非金属粉末化合物样品的测试分析结果.Both the mechanism of the background generated and the derivation process of Tougaard's method used for subtracting background in XPS are elucidated briefly,and the To ugaard's simplest form used for writ ing the calculation program is presente d.To inspect the suitable range to th e Tougaard's method,the most of samp les in this research which have not been i nvolved in the measurements by Tougaard are selected,such as PbCl 2?TiO2?SnCl 2?MoO3?NaCl ?NaBr ?KI ?NaH2PO4?Na 2SO4?and SiO2 .Of course,in order to compare with t he results mea-sured by Tougaard,the pure Au ?Ag ?Cu and Ni are also selected and measur ed.The program of Tougaard-like written by ourselves to use the VC lan guage are tried to be applied to subtr acting backgrounds of some spectra from fourteen various kinds of sampl e including metal?transition element and nonmetal.Al l of results from eigh-teen typical sets of data are compare d successively with those taken from both Shirley's and straight-line's methods(Fig.3～5and Table 2,3respectively).The comparisions of deviation of th ree experimental methods from the theoretical calculations are also made(Fig.6).Finally,according to our experime ntal results,it is shown that the Tougaard's method indeed could give out the more accurate peak area measu rements in XPS,i.e.possessing the least deviations from the theoretic al calculating value in the three methods used for both subtracting background and measuring the peak area not only s uitable for both the noble metal and t ransition metal,but also for the sam-ples of nonmetal and powder compound.

关 键 词：XPS 直线法 Tougaard理论 本底扣除 Shirley理论 定量分析 X射线荧光分析 

分 类 号：O657.62[理学—分析化学]