用于曲面精密检测的新型光纤三角传感器研究  

Research on a Novel Fiber-Optic Triangulation Sensor Used for Surface Precision Measurement

作　　者：赵勇[1] 刘丽华[1] 李鹏生[1] 浦昭邦[1] 

机构地区：[1]哈尔滨工业大学自动化测试与控制系

出　　处：《光学学报》2002年第4期476-480,共5页Acta Optica Sinica

基　　金：国防基金 (98J18 3 3HT0 12 9)资助课题

摘　　要：基于光纤传感技术和三角测量方法 ,提出了一种用于曲面检测的新型光纤三角传感器。根据所设计的轮辐式接收光纤结构 ,可以在测量曲面与传感头间位移时 ,首先获取被测点处微面元的倾斜信息 ,以便对传感器测量值进行实时误差修正 ,从而解决了被测表面倾斜对坐标测量带来的影响。该传感器还能有效地消除环境光干扰、光源波动、表面反射率变化等对测量带来的影响。建立了传感器测量的数学模型。理论分析和初步的实验结果证明了系统的有效性和实用性。该传感器系统不稳定性好于 0 .3% ,横向分辨率好于 8μm ,高度分辨率好于 0 .Based on the fiber optic sensor technology and triangulation method, a novel fiber optic triangulation sensor was proposed for surface measurement. According to the spoke like receiving fibers arrangement, the surface slope angle can be obtained as well as the displacement. The obtained slope information can be effectively used to improve the accuracy of the measured coordinate values impacted by slope angle of the measured surface. And measurement errors caused by ambient light fluctuation, intensity disturbance of the light source and reflectance variation can be effectively eliminated. The mathematical model was established. The theoretical analysis and the preliminary experimental results approve the effectivity and practicability of the system and the unstability of the system was better than 0.3%, the lateral and vertical resolutions can reach 8 μm and 0.1 μm, respectively.

关 键 词：精密检测 新型光纤三角传感器 三角测量法 曲面测量 精密工程 

分 类 号：TP212.14[自动化与计算机技术—检测技术与自动化装置] TG806[自动化与计算机技术—控制科学与工程]