智能高温压力传感器的研制  

A STUDY OF INTELLIGENT HIGH TEMPERATURE PRESSURE TRANSDUCER

作　　者：张黎丽[1] 莫长涛[1] 张伟力[2] 

机构地区：[1]哈尔滨商业大学 [2]哈尔滨师范大学

出　　处：《哈尔滨师范大学自然科学学报》2002年第2期41-44,共4页Natural Science Journal of Harbin Normal University

摘　　要：本文介绍了智能化硅-蓝宝石高温传感器的微机检测、运算处理和控制.由半导体工艺制成的硅压阻传感器,当其把压力信号转换为电信号以后,再由微机对检测的信号压力零点及灵敏度的温度补偿以及对压力非线性特性进行校正,最后对测量结果进行标定变换并显示.取得了理想的测量和控制效果.This paper is presented for the intelligent SOS pressure transducer of semiconductor type to introduce its microcomputer testing, operation process and controlling parts. After the electrical signal has been converted from the pressure signal, then the temperature ecmpensanon of its off-set and sensitivity of pressure and the correction of its linearity error are completed by using a microcomputer. The measurement results are converted and revealed into the pressure scale. The research has made an ideal efficiency of measurement and control.

关 键 词：智能高温压力传感器 温度补偿 非线性校正 硅压阻传感器 工作原理 微机控制 

分 类 号：TP212.6[自动化与计算机技术—检测技术与自动化装置]