无衍射光莫尔条纹空间直线度测量的原理与实验  

Principle and Experimental Research on Spatial Straightness Measurement by Means of Non-diffracting Beam and Moiré Fringe

作　　者：赵斌[1] 

机构地区：[1]华中科技大学机械科学与工程学院仪器系,武汉430074

出　　处：《计量学报》2002年第2期81-86,共6页Acta Metrologica Sinica

基　　金：国家自然科学基金 (5 980 5 0 0 6)

摘　　要：提出用无衍射光和莫尔条纹进行空间直线度测量的技术。无衍射光用作直线基准并照射在一环光栅上。由于无衍射光斑也是一系列环状条纹 ,因此光栅上将产生莫尔条纹。光栅固定在移动物体上 ,若运动轨迹偏离无衍射光的中心线 ,莫尔环就将发生偏离。莫尔环的偏离量数倍于光栅的偏离量 ,由此产生一放大的二维直线度信号。图像处理技术用于计算莫尔环的中心。理论和实验表明 ,该方法具有高灵敏度和抗激光漂移的优点。A method of spatial straightness measurement by means of non diffracting beam and moiré fringe is proposed. The non diffracting beam is used as a straightness datum. A ring grating is illuminated by this beam. Because the cross section pattern of the non diffracting beam is also a set of ring fringes, a ring moiré fringe on the grating surface will be generated. The grating is mounted on the moving object. If the movement track of the grating depart from the center line of the non diffracting beam, the position of the moiré ring will also depart. The quantity of the moiré ring departure is many times greater than that of the grating. Therefore an amplified two dimensional straightness signal is generated. Image processing techniques are used to calculate the center of the moiré ring. Theoretical analyses and experiment results show that the proposed straightness measurement method has the advantages of high sensitivity and resistance of laser beam drift.

关 键 词：空间直线度 测量 原理 无衍射光 莫尔条纹 图象处理 光学器件 

分 类 号：TB921[一般工业技术—计量学] TH74[机械工程—测试计量技术及仪器]