压电陶瓷的Nd∶YAG准脉冲激光打孔研究  

Investigation of the Drilling Conditions of Piezoelectric Ceramics by Pulsed Nd∶YAG Laser

作　　者：郭栋[1] 邵天敏[2] 李龙土[2] 桂治轮[2] 

机构地区：[1]清华大学材料系新型陶瓷与精细工艺国家重点实验室,北京100084 [2]清华大学摩擦学国家重点实验室,北京100084

出　　处：《压电与声光》2002年第2期104-106,138,共4页Piezoelectrics & Acoustooptics

摘　　要：由于陶瓷材料硬而脆的特性使其难以加工 ,对于形状复杂的陶瓷聚合物复合材料更是如此。根据 3- 1压电复合材料的结构特征和激光加工的特点 ,文章以声光调 Q Nd∶ YAG准脉冲激光器为工具研究了两种压电陶瓷钻孔的最佳条件及激光器参数对孔结构的影响 ,提出了一种简便的制备 3- 1压电复合材料的方法。实验表明 ,孔尺寸主要由激光功率决定 ,而孔的截面形状主要由光束入焦情况决定。通过调节激光参数 ,易制得直径 0 .15mm ,长径比大于Q switched quasi pulsed Nd∶YAG laser is adopted to drill compact holes on two kinds of piezoelectric ceramics in an attempt to fabricate the ceramic framework for 3 1 honeycomb ceramic polymer composite.The influence of some laser parameters,such as power level,pulse repetition rate and focus position,on the structure of the holes are carefully investigated.The morphology of the holes are observed by a S 450 scanning electron spectroscopy.The results show that the diameters of the holes are mainly determined by the power level of the laser and the focus position is the most important parameter in determining the cross section shape of the holes.Under appropriate conditions a ceramic framework with compact holes of a diameter of about 0 15 mm and a hole aspect ratio of 10 can be easily obtained.These results indicate that Nd∶YAG laser is an effective tool to fabricate 3 1 honeycomb piezoelectric composite.

关 键 词：压电复合材料 锆钛酸铅 压电陶瓷 ND:YAG 准脉冲激光打孔 

分 类 号：TN248.13[电子电信—物理电子学] TN249