基于现场总线的硅片处理系统计算机监控系统  

The Computer Supervising System of Silicon ProcessSystem Based on Field Bus

作　　者：王小军[1] 

机构地区：[1]陕西工学院机电工程系,汉中723003

出　　处：《机电一体化》2002年第3期57-59,共3页Mechatronics

摘　　要：硅片处理系统对系统运行的可靠性、可维护性、易操作性要求较高。本文提出了一种基于CAN总线的硅片处理系统的计算机监控系统，介绍了系统的工作原理、硬件结构和软件流程。实际应用表明，该系统能够实时监视硅片处理系统的运行状况，准确地对硅片处理系统的运行进行控制，同时能够及时发现故障、快速处理各种故障等，提高了硅片处理系统的可靠性和运行效率，具有良好的应用前景。Abstract: The silicon process system has a great demand for the system reliability, maintainability and maneuverability. This paper present a new computer supervising system for silicon process system, which is based on CAN bus, and introduce its working principle, hardware frame and software flow chart. The practical application shows that this system can supervise and control the running states of silicon process system on- line. At the same time, it can find the system fault intime and handle quickly the trouble. Thus, the reliability and running efficiency of silicon process system are advancedgreatly, and this system has a good applied foreground.

关 键 词：CAN总线 现场总线 硅片处理系统 计划机监控系统 

分 类 号：TP277[自动化与计算机技术—检测技术与自动化装置]