热激励微梁谐振器的温度分布和谐振振幅  

Temperature Distribution and Resonance Amplitude of Thermally Excited Micromechanical Beam Resonators

作　　者：韩建强[1] 朱长纯[1] 刘君华[1] 张声良[1] 段捷 

机构地区：[1]西安交通大学电子与信息工程学院,西安710049 [2]航天科技集团第十一研究所

出　　处：《西安交通大学学报》2002年第6期592-595,共4页Journal of Xi'an Jiaotong University

基　　金：国家自然科学基金资助项目 (6 0 0 36 0 16 ;5 0 0 770 16 ) ;教育部开放基金资助项目 (CETD0 0 - 10 )

摘　　要：对热激励微梁谐振器的结构进行了合理的简化 ,用解析方法求出了交变热源激励的微悬臂梁和微桥谐振器的温度分布 :在激励点附近 ,交变温度的幅度最大 ;远离激励点时 ,幅度趋于 0 .基于该温度分布 ,推导出了在“热膨胀效应”作用下微桥谐振器的谐振振幅 .该计算方法利用振型函数来计算谐振时桥长度的伸长量 。The temperature distribution along thermally excited micromechanical beam (cantilever or bridge) resonators is derived analytically according to their characteristics and geometry. The amplitude of the time-variant temperature component is high near the excitation point, while is low in points far away from the excitation point. The resonance amplitude of thermally excited micromechanical bridge resonators is calculated based on thermal expansion theory. The length of the bridge resonator is obtained by the mode function. In addition, the influence of internal stress on the amplitude is considered in calculating.

关 键 词：热激励 微悬臂梁 微桥 谐振器 谐振振幅 

分 类 号：TN304.01[电子电信—物理电子学]