强激光辐照下硅基片超薄多层金属镜的热畸变  

Thermal Distortion in a Super-thin Multilayer Metal Mirror with Silicon Substrate Subjected to Irradiation of High Power Lasers

作　　者：彭玉峰[1] 程祖海[1] 张耀宁[1] 周次明[1] 余文峰[1] 陆宇灵[1] 李锋[1] 

机构地区：[1]华中科技大学激光技术国家重点实验室,湖北武汉430074

出　　处：《中国激光》2002年第1期21-24,共4页Chinese Journal of Lasers

基　　金：国家自然科学基金 (批准号 :6 98780 0 8);教育部重点基金;国家"86 3"计划(86 3 4 10 0 4 8)资助项目

摘　　要：对硅基片超薄多层金属镜在CO2 激光辐照下的热特性进行了实验观测与理论分析。给出了超薄多层镜的结构设计方案 ,以及不同激光功率情况下镜面热变形与激光照射时间的关系曲线。结果表明 ,当反射镜吸收功率为 12 0W ,光照时间为 4s时 ,普通硅镜的热变形量为 0 71μm ;同等条件下硅基片超薄多层金属镜最大热变形量仅为 0 2 5 μm。理论计算与实验结果基本相符。The thermal properties of a super-thin multilayer metal mirror with silicon substrate subjected to irradiation of high power lasers are experimentally investigated and theoretically analyzed. The structural designs for the mirror and the relations between thermal deformation and laser irradiating time are presented. Results show that under the condition that absorption laser power is 120 W, and laser irradiating time is 4 s, the thermal deformation of the silicon super-thin multilayer mirror is 0.25 μm, but that of the general silicon mirror is 0.71 μm. Theoretical calculations are relatively accordant with the experimental results.

关 键 词：反射镜 热畸变 激光损伤 硅基片超薄多层金属镜 辐照 光束质量 

分 类 号：TN243[电子电信—物理电子学]