高导热AlN陶瓷材料制造及其应用研究  

Investigation on the Development of High Thermal Conductivity AlN Ceramics and Its Application

作　　者：李发[1] 刘征[1] 鲁燕萍[1] 刘慧卿[1] 高陇桥[1] 

机构地区：[1]北京真空电子技术研究所,北京100016

出　　处：《真空电子技术》2002年第3期53-55,共3页Vacuum Electronics

摘　　要：对AlN陶瓷材料制备过程中影响其性能尤其是导热性能的诸多因素进行实验 ,摸索出一套较合理的制备工艺 ,制造出性能较稳定、导热率高的AlN陶瓷材料。观察了AlN陶瓷的微结构并得出某些结论。已加工出AlN陶瓷夹持杆、收集极和输出窗 ,在微波管上试用 ,取得一些经验。In the paper, the effects of many processing factors on AlN ceramic material were investigated. A proper process was developed to manufacture AlN ceramic with high thermal conductivity and better dielectric properties. Microstructure of AlN ceramic was observed and some conclusions were obtained. AlN ceramic supporting bar, collector and output window were processed and used in microwave tubes. Some experiences were obtained.

关 键 词：AIN陶瓷 高导热率 微波管 

分 类 号：TB756[一般工业技术—真空技术]