脉冲激光焊接技术及在集成电路制造中的应用  

Pulsed Laser Welding Technology and its Application in Integrated Circuit Manufacturing

作　　者：姜幼卿[1] 韩学斌[1] 赵国义[1] 

机构地区：[1]华中科技大学,湖北武汉430074

出　　处：《电子工艺技术》2002年第4期177-180,共4页Electronics Process Technology

摘　　要：综合介绍了脉冲激光作为热源用于焊接的工艺特点 ,以及激光束质量或模式对焊接质量的重要意义。简要总结了国内外集成电路制造中脉冲激光焊接技术的应用和发展情况。Generally introduce the craft futures of pulsed laser used heat sourse in welding,and the important significance of the laser-beam quality/model is discussed on the welding quality.The application and development of pulsed laser welding are simply summed up in the integrated circuit manufacturing of the home and abroad.

关 键 词：脉冲激光焊接 激光束质量/模式 集成电路 

分 类 号：TN4[电子电信—微电子学与固体电子学]