有机衬底上掺Sb的SnO_2透明导电膜的性质与制备参数关系的研究  

Study on Relationship between the Properties of Transparent Conducting SnO _ 2∶Sb Films Deposited on Organic Substrates and Fabricating Parameters

作　　者：杨田林[1] 杨光德[1] 高绪团[1] 万云芳[1] 

机构地区：[1]山东理工大学物理系,淄博255049

出　　处：《光电子技术》2002年第2期63-67,共5页Optoelectronic Technology

基　　金：山东省计委九五攻关项目 (鲁计投资 199760 2 )资助课题

摘　　要：采用射频磁控溅射法在透明聚酯胶片上制备出了 Sn O2 ∶ Sb透明导电膜 ,主要讨论了制备条件对薄膜光电特性的影响。制备的样品为多晶薄膜 ,并且保持了二氧化锡的金红石结构 ,具有明显的 [1 1 0 ]的趋向。通过调节制备参数 ,制备出了电阻率为 3 .7× 1 0 -3 Ω· cm,平均透过率高于 80Transparent conducting SnO 2∶Sb films are deposited on polyimide substrates by r.f. magnetron sputtering. The structure, electrical and optical properties of the films depending on the deposition conditions have been investigated. The films are polycrystalline, with rutile structure and preferred orientation. High quality films with an average transparency of 80% and resistivity of 3.7×10 -3 Ω·cm have been obtained by controlling the deposition parameters.

关 键 词：有机衬底 导电膜 制备参数 透明薄膜 光电特性 溅射 掺铅 氧化锡 

分 类 号：O484[理学—固体物理]