双岛五梁式微型加速度传感器的结构分析  

Structural Analysis for Twin-island and Five-beam Microaccelerometer

作　　者：杨文硕[1] 

机构地区：[1]哈尔滨理工大学,哈尔滨150080

出　　处：《计量学报》2002年第3期199-204,共6页Acta Metrologica Sinica

摘　　要：用广义板理论和有限元平板壳元素与三维实体元素的组合方法 ,建立了微型加速度传感器整体的有限元分析模型。对模型进行了静态和动态分析 ,给出了具体的分析结果。依据强度条件对工作梁进行了优化设计 。With the theory of broad plates and combination method of plate shell elements with 3D solid elements the finite element, an analysis model of the whole structure of the microaccelerometer is created. The static and dynamic properties for the model are analyzed, and the analysis result is presented. According to the condition of strength, the work beam is optimally designed, which makes analysis for the structure and design of the microaccelerometer more rational.

关 键 词：微型加速度传感器 结构分析 优化设计 强度 应力 有限元 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]