水热法制备TiO_2薄膜的研究  

A study on TiO_2 thin films deposited by hydrothermal technique

作　　者：黄晖[1] 罗宏杰[2] 姚熹[1] 

机构地区：[1]西安交通大学电子陶瓷与器件教育部重点实验室,西安710049 [2]西北轻工业学院材料工程系,咸阳712081

出　　处：《物理学报》2002年第8期1881-1886,共6页Acta Physica Sinica

基　　金：国家杰出青年科学基金 (批准号 :5 0 0 2 5 2 0 8)资助的课题~~

摘　　要：采用水热法在玻璃基片上制备了TiO2 薄膜 .利用x射线衍射 (XRD)、x射线光电子能谱 (XPS)、扫描电子显微镜(SEM)等分析测试手段对所制备的TiO2 薄膜的相结构、表面化学组成及形貌等进行了分析和表征 ,研究了不同水热条件对所制备TiO2 薄膜的光吸收特性的影响 .结果表明 ,所制备的薄膜为锐钛矿型TiO2 ,均匀、致密、无可视缺陷 。TiO2 thin films were deposited on glass substrates by hydrothermal technique. The XRD, XPS and SEM were used to characterize the TiO2 thin films as well as TiO2 powders. The optical properties of the films prepared under different hydrothermal conditions were studied in details. The as-prepared films were anatase, homogenous, dense and crack-free. The films were transparent to visible light, and showed excellent absorbency of UV light.

关 键 词：制备 TIO2薄膜 水热法 比消光度 二氧化钛薄膜 光透过性 光吸收性 

分 类 号：O484.1[理学—固体物理]