基于偏转法的物体三维形貌测量  

Three- dimensional Object Shape Measurement Based on Deflection Method

作　　者：马蛟 王永红[1] 安东[1] 张浩[1] 孙建飞[1] 

机构地区：[1]合肥工业大学

出　　处：《工具技术》2014年第6期80-83,共4页Tool Engineering

基　　金：国家自然科学基金(51075116和51375136);安徽省国际科技合作计划资助项目(12030603012);教育部留学回国人员科研启动基金资助项目(2011JYLH1150)

摘　　要：基于数字散斑干涉测量技术,组建一套基于偏转法的物体三维形貌测量系统。首先,通过精密旋转平台使被测物体偏转微小角度,在其表面引入包含该物体形貌信息的弯曲干涉条纹。然后由散斑干涉条纹图提取其相位分布,对滤波后的包裹相位图进行相位解包裹运算,得到相位的真实分布图。最后根据相位分布与物面高度的关系求解出被测物体的高度信息。实验结果表明采用偏转法的散斑干涉技术可以实现物体三维形貌测量,具有测量精度较高、易于实现等优点。In order to realize measurements for the morphology of three - dimensional objects by utilizing Digtal Pat-tern Interferometry Technology, a three -dimensional measurement systemis established based on deflection methodFirst, By operating the precision rotary stage we could deflect the object a slight angle, we are able to lead into the curvedinterference fringes which involve its morphology information;then, extract the phase distribution from the fringe pattern images, and make the phase unwrapping operation for the filtered wrapped phase diagram to acquire the true phase distributionmap;finally, we could work out the height -information of the object according to its phase distribution and the height rela-tionship between the object and the plane. The result of experiment indicates that the precision of height measurement is 0.1 mm. The method has the advantages of high accuracy, easy realization,etc.

关 键 词：电子散斑干涉 形貌测量 偏转法 相位解包裹 

分 类 号：TG115[金属学及工艺—物理冶金] TH741[金属学及工艺—金属学]