液相等离子体电沉积钛膜的工艺及微观结构的研究  

The Research of Liquid Phase Plasma Electroplating Titanium Membrane

作　　者：李巧梅[1,2] 罗北平[2] 许友[2] 余红霞[2] 武鹄[2] 

机构地区：[1]湘潭大学化工学院,湖南湘潭411105 [2]湖南理工学院化学化工学院,湖南岳阳414006

出　　处：《湖南理工学院学报（自然科学版）》2014年第2期25-28,39,共5页Journal of Hunan Institute of Science and Technology(Natural Sciences)

摘　　要：在含有钛酸丁酯、乙醇及HCl的溶液中液相等离子体电沉积制取金属钛膜,研究了电流密度、电解液组成配比、HCl浓度和电极间距等参数对钛膜形貌及微观结构的影响,得到电解液组成最佳配比为钛酸丁酯:乙醇:HCl=25:74.5:0.5,最佳电流密度为700mA/mm2,最佳电极间距为10mm.SEM测试结果表明薄膜的表面形貌是平整光滑且具有金属光泽的膜层结构.This paper uses liquid phase plasma deposition to produce metal titanium with the composition of electrolyte, including butyl titanate, ethanol and HCl. Overall research is studied on the liquid phase plasma electro deposition parameters, as current density, electrolyte concentration, HCl concentration and electrode space. According to affects, we determine the best compose of butyl titanate（25% vol）,ethanol（74.5% vol）,HCl（0.5%）,the best state of the current density is 700 mA/mm2and the best electrode gap is 10 mm. Electron microscopy, energy spectrometer is used to analyze the membrane morphology, microstructure, and we get that the film is smooth and flat membrane layer structure with metallic luster.

关 键 词：等离子体电沉积 钛膜 微观结构 

分 类 号：O646[理学—物理化学]