面向介观尺度制造的螺杆型压电作动器  

Screw-Type Piezoelectric Actuator Applied in Meso-Scale Manufacturing

作　　者：华顺明[1] 李鑫[1,2] 楼应侯[1] 赵媛[1,2] 王晓[1,2] 

机构地区：[1]浙江大学宁波理工学院,宁波315100 [2]太原科技大学机械工程学院,太原030024

出　　处：《纳米技术与精密工程》2014年第4期300-305,共6页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(51275467);宁波市自然科学基金资助项目(2010A610129)

摘　　要：提出一种可应用于介观尺度零件精密加工进给的螺杆型直线压电作动器,该作动器定子与转子通过精密螺旋副相啮合.首先,建立了该直线压电作动器定子的有限元计算模型;然后,运用ANSYS软件进行了模态分析和谐响应分析,讨论了结构参数对定子谐振频率及振幅的影响,得出了一般规律;最后,根据定子优化设计结果制作了实验样机和专用驱动电源.实验结果表明:该作动器具有较好的输出性能,在电压峰峰值为300 V、驱动频率为16kHz的情况下,其最大空载速度为24 mm/s,最大输出力为6 N,基本可以满足介观尺度对象车铣复合加工对于驱动力和进给速度的要求.A screw-type linear piezoelectric actuator for feedingwas proposed. The stator and rotor of this actuator are engagedmechanism in meso-scale manufacturingby precision screw-pair. Firstly, the stator＇ s finite element analysis （FEA） model was established. Then, the influence laws of structural param-eters on resonant frequency and amplitude were obtained through modal and harmonic response analysesby ANSYS. Finally, the prototype actuator and specified power supply were manufactured based on theoptimized results. The experimental results show that the actuator＇s performances are satisfactory. Themaximum no-load speed is 24 mm/s and the maximum output force is about 6 N under driving voltage of300 V and driving frequency of 16 kHz, which can approximately meet the need of turn-milling machiningof meso-scale elements on feeding force and velocity.

关 键 词：压电作动器 精密螺旋副 谐振频率 介观尺度制造 

分 类 号：TB535[理学—物理]