FeCoAlN软磁薄膜的制备与性能  

Preparation and properties of FeCoAlN soft magnetic films

作　　者：周俊[1] 陈彦[1] 倪经[1] 陈学平[1] 黄豹[1] 邹延珂[1] 

机构地区：[1]西南应用磁学研究所,四川绵阳621000

出　　处：《磁性材料及器件》2014年第4期45-49,共5页Journal of Magnetic Materials and Devices

摘　　要：采用磁控溅射法在Ar+N2的混合气氛中制备FeCoAlN薄膜,并对其进行磁场真空热处理,以研究薄膜的结构、磁性及热稳定性。当N2与(N2+Ar)的流量比为9%时制备的薄膜具有良好的软磁性能。随着Al含量的增加,薄膜的热稳定性明显得到改善。Al含量为13.5%的(Fe64.8Co35.2)AlN薄膜在400℃真空磁场热处理60min,仍然具有良好的软磁性能,其饱和磁化强度μ0Ms为1.2T,易轴矫顽力为0.68kA/m,各向异性场为2.8 kA/m。FeCoA1N films were prepared by reactive radio frequency magnetron cosputtering technique in mixture atmosphere of argon and nitrogen, followed by magnetic vacuum annealing, and their microstructure, magnetic properties and thermal stability were investigated. The FeCoAIN films deposited at N2/（Ar＋ N2） gas flux percentage of 9% have good soft magnetic properties. The magnetic thermal stability of the FeCoN films can be obviously improved with increasing A1 content. The （Fe64.sCo35.2）86.5A113.5N films annealed at 400℃ for 60 min exhibit good magnetic soft properties with a saturation magnetization （μ0M5） of 1.21 T, an easy axis coercive field （Hce） of 0.68kA/m, and an anisotropy field （Hk） of 2.8 kA/m.

关 键 词：FeCoAlN薄膜 制备 结构 磁性能 热稳定性 

分 类 号：O484.43[理学—固体物理]