基于AAO纳米光栅的薄膜硅太阳能电池表面减反结构设计与仿真  

Design and Simulation of Anodic Aluminum Oxide Nanograting Anti-reflection Structure for Thin Film Silicon Solar Cells

作　　者：秦飞飞[1] 张海明[1] 王彩霞[1] 王旭[1] 杨金梅[1] 

机构地区：[1]天津工业大学理学院,天津300387

出　　处：《人工晶体学报》2014年第6期1488-1492,共5页Journal of Synthetic Crystals

基　　金：国家自然科学基金(61274064)

摘　　要：提出了一种新型的表面带有阳极氧化铝(AAO)纳米光栅的薄膜硅太阳能电池表面减反结构。理论分析设计了AAO纳米光栅结构参数。用Tracepro光学软件研究了不同占空比和光栅常数对薄膜硅光吸收的影响,得到了最佳结构参数。在此基础上,运用FDTD软件进一步模拟了带有最佳AAO结构尺寸的太阳能电池吸收谱线。仿真结果表明在光栅常数为440 nm,光栅高度为75 nm,占空比为0.5结构尺寸下,AAO具有最强的加强光吸收的作用。In this paper, a new surface anti-reflection film with anodic aluminum oxide （AAO） nanograting was proposed for thin film silicon solar cells. Then we analyzed and designed the structure parameters in theory. By using the software of Tracepro, we explored the influence of AAO＇s duty circle and grating constant to light absorption. Actually, the best structure parameters were got. We also use FDTD software to get the absorption spectrum in optimized AAO size. The result showed that when the aperture is 440 nm, the AAO height is 75 nm and the duty ratio is 0.5, the enhancement is most obvious.

关 键 词：太阳能电池 AAO 减反结构 TRACEPRO FDTD 

分 类 号：O432[机械工程—光学工程]