Mechanical behavior study of microdevice and nanomaterials by Raman spectroscopy:a review  

作　　者：Wei Qiu Yi-Lan Kang 

机构地区：[1]Tianjin Key Laboratory of Modern Engineering Mechanics,Department of Mechanics,Tianjin University

出　　处：《Chinese Science Bulletin》2014年第23期2811-2824,共14页

基　　金：financially supported by the National Basic Research Program of China (2012CB937500);the National Natural Science Foundation of China (11227202,11372217 and 11272232);the Program for New Century Excellent Talents in University (NCET-13)

摘　　要：With the rapid development of micro/nano manufacturing technology and nanomaterials,the accurate measurement of the mechanical properties and behaviors at the micro-nano scale represents a new field of mechanical experiments.Raman spectroscopy,which is based on lattice dynamics theory,is applicable to the detection of the statistical information of the lattice structure deformation within the measuring points.Due to its peculiarities,such as non-destructiveness,convenience and high-resolution,this technology allows the on-line in situ measurement of residual stress in microstructures caused by processing and can also achieve the real-time deformation of graphene,carbon nanotubes and other nanomaterials under force loading.In recent years,mechanical measurements based on Raman spectroscopy technology have developed rapidly.In this review,Raman-based stress measurement theories for several commonly used materials are briefly described.Applications related to the residual stress measurements of microstructure and experimental investigations of the mechanical properties of low-dimensional nanomaterials are then reviewed.Finally,the development trend of this method is proposed.With the rapid development of micro/nano manufacturing technology and nanomaterials, the accurate measurement of the mechanical properties and behaviors at the micronano scale represents a new field of mechanical experiments. Raman spectroscopy, which is based on lat tice dynamics theory, is applicable to the detection of the statistical information of the lattice structure deformation within the measuring points. Due to its peculiarities, such as non-destructiveness, convenience and highresolution, this technology allows the online in situ measurement of residual stress in microstructures caused by processing and can also achieve the realtime deformation of graphene, carbon nanotubes and other nanomaterials under force loading. In recent years, mechanical measurements based on Raman spectroscopy technology have developed rapidly. In this review, Ramanbased stress measurement theories for several commonly used materials are briefly described. Applications related to the residual stress measurements of microstructure and experimental investigations of the mechanical properties of lowdimensional nanomaterials are then reviewed. Finally, the development trend of this method is proposed.

关 键 词：拉曼光谱仪 动力学理论 纳米材料 行为研究 纳米制造技术 残余应力测量 展望 微型 

分 类 号：O657.37[理学—分析化学]