Thickness dependence of the optical constants of oxidized copper thin films based on ellipsometry and transmittance  

作　　者：宫俊波 董伟乐 代如成 王中平 张增明 丁泽军 

机构地区：[1]Department of Physics, University of Science and Technology of China [2]The Center of Physical Experiments, University of Science and Technology of China

出　　处：《Chinese Physics B》2014年第8期112-116,共5页中国物理B（英文版）

基　　金：Project supported by the National Natural Science Foundation of China(Grant Nos.11074232,10874160,and 21002097);the National Basic Research Program of China(Grant Nos.2011CB932801 and 2012CB933702)

摘　　要：Thin oxidized copper films in various thickness values are deposited onto quartz glass substrates by electron beam evaporation. The ellipsometry parameters and transmittance in a wavelength range of 300 nm-1000 nm are collected by a spectroscopic ellipsometer and a spectrophotometer respectively. The effective thickness and optical constants, i.e., refractive index n and extinction coefficient k, are accurately determined by using newly developed ellipsometry combined with transmittance iteration method. It is found that the effective thickness determined by this method is close to the physical thickness and has obvious difference from the mass thickness for very thin film due to variable density of film. Furthermore, the thickness dependence of optical constants of thin oxidized Cu films is analyzed.Thin oxidized copper films in various thickness values are deposited onto quartz glass substrates by electron beam evaporation. The ellipsometry parameters and transmittance in a wavelength range of 300 nm-1000 nm are collected by a spectroscopic ellipsometer and a spectrophotometer respectively. The effective thickness and optical constants, i.e., refractive index n and extinction coefficient k, are accurately determined by using newly developed ellipsometry combined with transmittance iteration method. It is found that the effective thickness determined by this method is close to the physical thickness and has obvious difference from the mass thickness for very thin film due to variable density of film. Furthermore, the thickness dependence of optical constants of thin oxidized Cu films is analyzed.

关 键 词：thin film optical constants thickness COPPER 

分 类 号：O484.41[理学—固体物理] P618.13[理学—物理]