大气等离子喷涂TiO2涂层性能及厚涂层制备工艺  

Properties of TiO_2 Coating Deposited by Atmospheric Plasma Spraying and Thick Coating Fabrication Process

作　　者：杨焜[1] 邓畅光[1] 邝子奇[1] 曾威[1] 

机构地区：[1]广州有色金属研究院新材料研究所,广州510650

出　　处：《中国表面工程》2014年第4期12-18,共7页China Surface Engineering

基　　金：广东省国际合作项目(2009B050700050)

摘　　要：为改善TiO2溅射靶材主要依赖进口的局面,采用大气等离子喷涂技术在不锈钢SUS304平板基体及管状基体上制备了TiO2涂层。利用扫描电子显微镜对涂层形貌进行了观察,并对涂层与基体的结合强度、涂层孔隙率及抗热震性能分别进行了表征。结果表明:粉末熔化及铺展良好,截面可见典型层状结构。涂层与基体以机械结合为主,断裂基本发生在基体与粘结层界面处;涂层的孔隙率较低,同时具有良好的抗热震性能。厚涂层制备过程中,采用循环水冷却方法对不锈钢SUS304管状基体进行冷却,涂层沉积速度快且无开裂和脱落,涂层厚度可达8mm。通过对冷却装置的改进及喷涂工艺的进一步优化,有望在大尺度管状基体上制备厚涂层以满足溅射蒸镀辊的需要。To improve the situation that most of the TiO2 sputter targets are depend on imports, TiO2 coating was deposited on the flat SUS304 substrate and hollow pipe suhstrate by atmospheric plasma spraying in this study. The coating morphologies in detail were observed by scanning electron microscope. The adhesion strength, porosity and thermal shock resistance of the coating were evaluated, respectively. The results show that most of the feedstock powders are fully melted and flatted sufficiently on the substrate, and the coating has a typical multi-layer and dense structure from the cross section view. The coating adheres well to the substrate mainly by mechanical adhesion, and the fracture is found at the interface between the substrate and the bond coating. Meanwhile, the thermal shock resistance of the coating is quite well. TiO2 thick coating is successfully fabricated on the hollow SUS304 pipe suhstrate by circulating water cooling during the spraying process. The coating deposition rate is favorable and with no cracking and falling, the thickness of the coating can reach up to 8 mm. By further optimization of the cooling system and spraying parameters, thick coating can be fabricated on the large scale tubular substrate, and this technology can be expected to be used in sputtering rolls.

关 键 词：大气等离子喷涂 TIO2 厚涂层 

分 类 号：TG174.442[金属学及工艺—金属表面处理]