等离子喷涂PZT涂层的制备与性能分析  

Preparation and Performance of PZT Coatings Sprayed by Plasma Spraying

作　　者：石伟丽[1,2] 邢志国[2,3] 王海斗[2] 李国禄[1] 顾林松[1,2] 

机构地区：[1]河北工业大学材料科学与工程学院,天津300130 [2]装甲兵工程学院再制造技术重点实验室,北京100072 [3]清华大学摩擦学国家重点实验室,北京100084

出　　处：《中国表面工程》2014年第4期19-24,共6页China Surface Engineering

基　　金：北京市自然科学基金(3142019);国家重点基础研究发展计划(973计划)(2011CB013405);清华大学摩擦学国家重点实验室开放基金(SKLTKF13A01)

摘　　要：用等离子喷涂方法在45号钢基体表面制备了锆钛酸铅(PZT)陶瓷涂层,并用扫描电镜(SEM)、X射线衍射仪(XRD)、透射电镜(TEM)、纳米压痕测量仪和d33准静态测量仪等检测手段对涂层的微观形貌、成分、纳米硬度、弹性模量和压电常数等各项性能进行分析,并测量涂层的介电温谱。结果表明:等离子喷涂制备的PZT陶瓷涂层具有典型的层状结构,结构致密,孔隙率为1.96%;纳米硬度和弹性模量平均值分别为5.881GPa和113.413GPa;压电常数达到了74pC/N,并且由介电常数与温度关系图可推知PZT的居里温度约为370℃。制备的PZT涂层性能良好,使其在实际工况中的使用成为可能。PZT piezoelectric ceramic coatings were prepared by plasma spraying on 45 steel substrate, then the microstructure morphology, phase composition and mechanical properties of the coatings were analyzed by scanning electron microscope （SEM）, X-ray diffraction （XRD）, transmission electron microscope （TEM）, nano-indentation tester and Belincourt-type quasi-static d33 meter. The results show that PZT ceramic coatings by plasma spraying preparation have a typical lamellar structure, dense structure and low porosity; the surface of the PZT coatings were smooth, and characteristics of porosity is 1.96%. The average nana-hardness and modulus of elasticity were 5. 881 GPa and 113. 413 GPa, respectively. The piezoelectric constant reaches 74 pC/N. Through dielectric constant and temperature diagram, the Curie temperature of PZT can be in ferred to be about 370 ℃. The performance of the PZT coatings is good, so that the good effect can be acquired in actually working condition.

关 键 词：锆钛酸铅 等离子 涂层 

分 类 号：TG174.442[金属学及工艺—金属表面处理]