以环戊二烯为碳源制备类富勒烯结构碳基薄膜的结构及力学性能  

Structure and Mechanical Behavior of Fullerene-like Carbon Films Using Cyclopentadiene as Carbon Source

作　　者：张庆堂[1] 吴坤尧 龚珍彬 张斌[2] 张俊彦[2] 

机构地区：[1]兰州理工大学石油化工学院,兰州730050 [2]中国科学院兰州化学物理研究所固体润滑国家重点实验室,兰州730000

出　　处：《中国表面工程》2014年第4期89-94,共6页China Surface Engineering

基　　金：国家自然科学基金(51275508);国家重点基础研究发展计划(973计划)(2013CB632300)

摘　　要：以环戊二烯为碳源,采用等离子体增强化学气相沉积法(PECVD)在Si单晶〈n-100〉面上制备了类金刚石薄膜。采用FEI Tecnai F30型高分辨透射电镜(HRTEM)和LAMRAM HR 800型拉曼光谱仪对薄膜及磨屑的结构进行表征;利用MFT-R4000摩擦磨损试验机、Hysitron Ti-950型原位纳米力学测试系统考察薄膜的摩擦学及力学性能。结果表明:所制备的金刚石薄膜具有富勒烯纳米团簇/非晶复合纳米结构,在磨屑中也出现了这种稳定的片层结构从而起到了良好的减摩作用;并且薄膜表现出优异的力学性能和摩擦学性能:其硬度为26.8GPa、弹性回复为85%、摩擦因数为0.01。由于这种特殊纳米结构的存在,使得薄膜的力学性能及摩擦学性能显著提高。Carbon films were synthesized by plasma enhanced chemical vapor deposition technique on silicon （n-100） substrate using cyclopentadiene as the carbon source. The microstructure of the films and wear debris were characterized by high resolution transmission electron microscopy （HRTEM Tecnai F30） and Raman spectra（LABRAM HR 800）. The tribological and mechanical behaviors were investigated by friction-abrasion testing machine （FMT-R4000） and nanoindentation （Hysitron Ti-950）. The results show that the films have fullerene-like clusters/amorphous composite nanostructure, and the stable lamellar nanostructures also appear in wear debris and have the good anti-friction effect. The films also show excellent mechanical properties and tribological performance. The hardness of the films is 26.8 GPa, elastic recovery is 85 %, and the friction coefficient is 0.01. Because of the existence of these special nanostructures, the films mechanical and tribological properties are significantly improved.

关 键 词：环戊二烯 碳基薄膜 力学性能 摩擦学性能 

分 类 号：TG174.444[金属学及工艺—金属表面处理]