基片位置对激光会聚铬原子沉积的影响  

Effects of Substrate Position on Laser-Focused Cr Atom Deposition

作　　者：张宝武[1] 张文涛[2] 王道档[1] 余桂英[1] 

机构地区：[1]中国计量学院计量测试工程学院,浙江杭州310018 [2]广西自动检测技术与仪器重点实验室(桂林电子科技大学),广西桂林541004

出　　处：《光学学报》2014年第8期53-59,共7页Acta Optica Sinica

基　　金：国家自然科学基金(11064002);浙江省自然科学基金(LQ13F050002);广西自动检测技术与仪器重点实验室基金(YQ14206);广西自然科学基金(2012GXNSFAA53229;2013GXNSFDA019002)

摘　　要：为了研究基片位置对激光会聚铬原子沉积的影响,基于原子的粒子运动,采用数值计算对基片切割会聚激光场不同部位时高斯激光驻波场光学势阱、原子运动轨迹和沉积条纹进行了仿真。研究结果充分显示了基片位置对上述三方面的影响。虽然基片会对激光产生衍射,但是无论衍射存在与否,沉积条纹半峰全宽的最小值和中心峰值的最大值都出现在基片表面和激光中轴线重合的位置。此时,衍射将使条纹中心峰值降为非衍射时的0.96倍,同时,半峰全宽增加至非衍射时的1.03倍。另外,仿真结果显示,不管是否考虑衍射,垂直于激光中轴线方向(y方向)上沉积条纹的中心峰值随y值的增加呈现单调减小的趋势,而条纹半峰全宽随y值的增加呈现单调递增的趋势。In order to study the effect of substrate position on laser-focused Cr atom deposition, the simulations of optical potential of Gaussian laser standing wave, atomic trajectories and deposited lines are performed based on the perspective of atomic trajectory with different substrate positions in the focusing laser. Effects on the above three aspects are fully indicated by substrate position. In spite of diffraction by substrate, the optimal substrate position occurs when substrate surface coincides with the laser axis. At the optimal position, with diffractive laser, deposited lines have full width at half maximum （FWHM） 0.96 times and the center peak value 1.03 times of that deposited by non-diffractive laser. Further more, in spite of diffraction by substrate, the deposited lines along y direction perpendicular to the laser axis have monotone decreasing center peak values and monotone increasing FWHM with different values of y.

关 键 词：衍射 激光会聚 光学势阱 铬原子 

分 类 号：TN249[电子电信—物理电子学]