基于圆偏振光合成的动态干涉仪同步移相技术研究  

The Research about Simultaneous Phase Shifting Technology of Dynamic Interferometer Based on Synthesis of Circularly Polarized Light

作　　者：樊孝贺 艾华[1] 曹艳波[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院大学,北京100039

出　　处：《机电产品开发与创新》2014年第4期4-6,共3页Development & Innovation of Machinery & Electrical Products

摘　　要：动态干涉仪是一种高精度的测量仪器,为了研究动态干涉仪的同步移相技术,论文通过建立两束旋向相反的圆偏振光合成的数学模型,更加清晰的表现了合成光束的传播状态,分析了合成光束经过起偏器后其干涉图像相位与起偏器摆放角度的关系。以此为基础,设计动态干涉仪光路并搭建试验台,最终用四个CCD同步采集到四幅相位依次相差90°的干涉图像,实现对被测镜面的动态测量,为提高干涉仪测量结果的准确性奠定了基础。Dynamic interferometer is a high precision measuring instrument,in order to research the simultaneous phase shifting technology of dynamic interferometer,the article express the spread condition of synthesis fight more clearly through mathematical modelling of the synthesis of circularly polarized light which are reversed,then analyzing the relation between the interference image after the synthesis light through the polarizer and the laying angle of the polarizer,on this basis,designing the light path and building the test bench and then collecting four interference image whose phase difference are 90° successively using four CCD, realizing the measurement of the mirror surface and laying the foundation of enhancing the result of interferometer measurement.

关 键 词：同步移相技术 圆偏振光合成 起偏器 同步采集 

分 类 号：TN2[电子电信—物理电子学]