ZnO单晶的生长表面形貌及形成机制研究  

Growth Surface Morphology and Formation Mechanism of ZnO Single Crystals

作　　者：王茂州 曾体贤[1,2] 胡永琴[1,2] 彭丽萍[1] 王雪敏[1] 吴卫东[1] 

机构地区：[1]中国工程物理研究院激光聚变研究中心等离子体物理重点实验室,绵阳621900 [2]西华师范大学物理与电子信息学院,南充637009

出　　处：《人工晶体学报》2014年第7期1668-1671,共4页Journal of Synthetic Crystals

基　　金：中国博士后科学基金(2013M542294);四川省科技厅应用基础项目(2014JY0133)

摘　　要：采用石墨辅助化学气相传输法生长了ZnO单晶体。利用XRD、金相显微镜和扫描电镜等对晶体结构和表面形貌进行研究,发现其表面由大量六边形台阶堆垛而成,单个晶粒呈六方伞状结构并始终显露(001)面。同一平面内台阶的大小、陡峭程度存在差异,台阶之间为平行走向。通过形成机制分析,获得生长体系的过饱和度συ约为7%,发现生长表面的腐蚀形貌为六边形平底蚀坑,确定在化学气相法中ZnO单晶呈台阶生长的主要条件是螺旋位错。ZnO single crystals were grown by graphite assistant chemical vapor phase transport method.The structure and surface morphology of ZnO single crystals were analyzed by means of X-ray diffraction,metallographic microscope and scanning electronic microscope（SEM）. The results show that crystals surface consists of many hexagon steps. The crystalline grain with hexagon umbrella structure always shows（001） surface. The size and steep degree of steps in the same plane are different and the directions are parallel between the steps. The degree of supersaturation of system is 7%. The corrosion morphology of growth surface is flat-bottomed hexagon etch pit. Analysis of the mechanism indicates that the screw dislocation is main factor of step growth.

关 键 词：氧化锌单晶 化学气相法 表面形貌 生长机制 

分 类 号：O781[理学—晶体学]