负温度系数的工业热敏电阻温度传感器测量误差的不确定度评定  

Assessment of the uncertainty in temperature measurements by industrial negative temperature coefficient thermistor sensors

作　　者：崔洋[1] 彭吉[1] 于淼[1] 李佩玥[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,长春130033

出　　处：《电子测量技术》2014年第8期104-106,111,共4页Electronic Measurement Technology

基　　金：国家重大科技专项02专题(2009ZX02205)项目

摘　　要：光刻系统内部温度等微环境参数的波动是影响成像质量的重要因素,影响光刻机最终的线宽,因此对光刻系统内温度传感器测量的不确定度有极高的要求。本文对负温度系数的热敏电阻及其R-T特性进行简介,并针对工业级热敏电阻温度传感器进行了不确定分析,分别计算了标准测温仪引入的不确定度分量、标准温度传感器引入的不确定度分量以及测量重复性引入的不确定度分量,分析得到使用的工业级热敏电阻温度传感器合成不确定度为2.178m℃,扩展不确定度为为4.356m℃,满足对光刻系统内高精度温度测量的指标要求。The temperature parameters fluctuations of lithography micro-environment system is an important factor affecting image quality, also it is an important factor affecting the final impact of lithography linewidth. So the uncertainty of temperature sensor in the lithography systems has high demands. In this paper, the characteristics of the thermistor negative temperature coefficient and R-T are introduced, and the details are giving for industrial-grade thermistor temperature sensors uncertainty analysis, calculate the uncertainty introduced by component standard thermometer,standard temperature sensor and repeatability of measurement, the result that the combined uncertainty and expanded uncertainty （including long-term drift） of industrial-grade thermistor temperature sensor are 2. 178 m℃ and 4. 356m℃. Meet requirements of the lithography system for precision temperature measurement.

关 键 词：负温度系数 热敏电阻 不确定度 不确定度来源 温度传感器 

分 类 号：TP212.6[自动化与计算机技术—检测技术与自动化装置]