用于光栅拼接的微位移驱动器的精度分析  

Analysis of the actuator with nano-step applied in grating tiling

作　　者：章亚男[1] 葛磐 王成刚[1] 钱晋武[1] 沈林勇[1] 

机构地区：[1]上海大学精密机械工程系,上海200072

出　　处：《电子测量技术》2014年第8期117-122,共6页Electronic Measurement Technology

摘　　要：为了满足大尺寸衍射光栅拼接调整架精密调整的需求,设计了一种机械式微位移驱动器,它能够实现十几mm的大行程和纳米量级的定位精度。根据驱动器各零部件的性能参数和技术指标,分析计算了影响驱动器运动分辨率的因素及其大小。通过对机构爬行现象的分析,近似计算出由于导轨间动静摩擦系数不同导致的爬行量的大小。实验测试结果显示,驱动器的运动分辨率可达到10nm,运动过程中具有很好的重复性,而且驱动器可以长时间保持很好的稳定性。该研究结论对后期光栅调整架的设计具有很大的参考价值。To meet the demand of micro-displacement actuator with nanometer positioning accuracy in the process of large-aperture grating tiling, a mechanical micro-displacement actuator was designed. It not only can achieve the requirements of a large stroke more than a dozen millimeters and nanometer positioning accuracy, but also has many advantages, such as compact structure, high reliability and single control. According to the performance parameters of various components of the actuator and the testing of the ball screw, the actuator＇s positioning accuracy error was calculated. Through an analysis of the creeping phenomenon, the crawling cont the difference between dynamic and static friction coefficient of the guide. In th was measured,according to the value, the offset method should be used in th ent was approximate calculated caused by e experiment, the actuator＇ s return errors e actual result showed that the actual positioning accuracy of the micro-displacement act reproducibility is good during movement Furthermore. The actuator can maintain good operation. The experimental test uator can reach lOnm, and the stability for a long time.

关 键 词：光栅拼接 纳米定位 驱动器 误差分析 实验测试 

分 类 号：TP2[自动化与计算机技术—检测技术与自动化装置]