GaN-based light-emitting diodes with hybrid micro/nano-textured indium-tin-oxide layer  

作　　者：黄华茂 胡金勇 王洪 

机构地区：[1]Engineering Research Center for Optoelectronics of Guangdong Province, Department of Physics, School of Science, South China University of Technology

出　　处：《Journal of Semiconductors》2014年第8期89-93,共5页半导体学报（英文版）

基　　金：Project supported by the National High Technology Research and Development Program of China(No.2014AA032609);the Strategic Emerging Industry Special Funds of Guangdong Province(Nos.2010A081002009,2011A081301004,2012A080302003);the Fundamental Research Funds for the Central Universities(Nos.2013ZM093,2013ZP0017)

摘　　要：Three types of textured indium-tin-oxide （ITO） surface, including nano-texturing and hybrid micro/nano-texturing with micro-holes （concave-hybrid-pattem） or micro-pillars （convex-hybrid-pattern）, were applied to GaN-based light-emitting diodes （LEDs）. The nano-texturing was realized by maskless wet-etching, and the micro-texturing was achieved by standard photolithography and wet-etching. Compared to LED chips with flat ITO surface, those with nano-pattern, concave-hybrid-pattern, and convex-hybrid-pattern exhibit enhancement of 11.3%, 15.8%, and 17.9%, respectively, for the light-output powers at 20 mA. The electrical performance has no degradation. Moreover, the convex-hybrid-pattern show higher light-output efficiency under small injection current, while the concave-hybrid-pattern exhibit better light-output efficiency at large injection current. The light- extraction efficiency is simulated by use of two-dimensional finite difference time domain method, and the numer- ical results are consistent with the experiments.Three types of textured indium-tin-oxide （ITO） surface, including nano-texturing and hybrid micro/nano-texturing with micro-holes （concave-hybrid-pattem） or micro-pillars （convex-hybrid-pattern）, were applied to GaN-based light-emitting diodes （LEDs）. The nano-texturing was realized by maskless wet-etching, and the micro-texturing was achieved by standard photolithography and wet-etching. Compared to LED chips with flat ITO surface, those with nano-pattern, concave-hybrid-pattern, and convex-hybrid-pattern exhibit enhancement of 11.3%, 15.8%, and 17.9%, respectively, for the light-output powers at 20 mA. The electrical performance has no degradation. Moreover, the convex-hybrid-pattern show higher light-output efficiency under small injection current, while the concave-hybrid-pattern exhibit better light-output efficiency at large injection current. The light- extraction efficiency is simulated by use of two-dimensional finite difference time domain method, and the numer- ical results are consistent with the experiments.

关 键 词：light-emitting diodes hybrid micro/nano-textured INDIUM-TIN-OXIDE light-output 

分 类 号：TN312.8[电子电信—物理电子学]