基于高温烧结氧化铝陶瓷的无线无源温度传感器  

Wireless Passive Temperature Sensor Based on High Temperature Sintering Alumina Ceramic

作　　者：任重[1,2] 谭秋林[1,2,3] 李晨[1,2] 郑庭丽 蔡婷[1,2] 熊继军[1,2] 

机构地区：[1]中北大学电子测试技术重点实验室,太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [3]重庆大学新型微纳器件与系统技术国家重点学科实验室,重庆400044

出　　处：《传感技术学报》2014年第5期654-657,共4页Chinese Journal of Sensors and Actuators

基　　金：高等学校优秀青年学术带头人支持计划;国家自然科学基金重点项目(61335008)

摘　　要：通过高温烧结技术获得了总体尺寸为28 mm×28 mm×0.47 mm的氧化铝陶瓷基板,结合厚膜技术在该基板上印刷无源LC串联谐振电路,设计并制备了一种基于氧化铝陶瓷的无线无源温度传感器。在18℃~300℃的温度范围内实现了传感器的无线测试,测试结果表明该温度传感器呈现出了良好的线性特征,线性范围大且非线性误差小,其谐振频率对温度的灵敏度约为2.75 kHz/℃,可应用于高温恶劣环境下的温度检测。A wireless passive temperature sensor based on Alumina ceramic is designed and fabricated, where the alumina ceramic substrate is obtained with the overall size of 28 minx28 minx0.47 mm through high temperature sintering technology, and passive LC series resonant circuit is printed on the substrate by thick film technology. A wireless test on the sensor is achieved under the temperature from 18 ℃ to 300 ℃. The results show that the temperature sensor demonstrates good linear characteristics, large linear range and low non-linear error. The sensitivity of the sensor on resonant frequency to temperature is about 2.75 kHz/℃. It can be applied to detect high temperature in harsh environments.

关 键 词：无线无源传感器 温度 高温烧结 氧化铝陶瓷 谐振频率 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]