锰钴镍氧薄膜热敏型多元红外探测器研制  

Development of bolometer detector array made of Mn-Co-Ni-O thin films

作　　者：张雷博[1] 侯云[1] 周炜[1] 黄志明[1] 褚君浩[1] 

机构地区：[1]中国科学院上海技术物理研究所红外物理国家重点实验室,上海200083

出　　处：《红外与毫米波学报》2014年第4期359-363,共5页Journal of Infrared and Millimeter Waves

基　　金：国家自然科学基金(61275111;11204336);上海市自然科学基金(11ZR1442400;12ZR1452200)~~

摘　　要：通过光刻和湿化学腐蚀工艺,成功制作出规格为2×8的多元锰钴镍氧薄膜红外探测器件.测试表明,室温下锰钴镍氧薄膜材料负电阻温度系数达-3.8%K-1.10 Hz调制频率和±15 V电压偏置条件下,线列器件典型探测元黑体响应率为107 V/W,探测率为2×107cmHz1/2/W,8元器件响应不均匀度为5.9%.实验结果表明锰钴镍氧薄膜焦平面器件制备的可行性,有可能作为新型室温全波段探测器件得到应用.The 2 × 8 element MnCoNiO detector array was successfully fabricated with photolithography and wet-chemi- ca/etching process. It was shown that the negative temperature coefficient of resistance of the film reaches -3.8% K-1 at room temperature. The typical element of the fabricated detector array exhibits responsivity of about 107 V/W and detectivity of about 2 x 107 cmHz1/2/W respectively at bias voltage of ± 15 V and chopping frequency of 10Hz. The re- sponse uniformity of the linear array bolometers is about 5.9%. Our results proved the feasibility of MnCoNiO films for linear array bolometer applications, which can possibility be used as new-type uncooled bolometer detectors.

关 键 词：锰钴镍氧薄膜 热敏材料 线列焦平面 

分 类 号：TN21[电子电信—物理电子学]