耐特种气体腐蚀涡旋干泵的研制  

Development of Corrosion-Resistant Dry Scroll Vacuum Pump For Specialty Gases

作　　者：金花子[1] 吴杰[1] 南泉 熊天英[1] 

机构地区：[1]中国科学院金属研究所,辽宁沈阳文化路72号110016

出　　处：《低温与特气》2014年第4期16-18,共3页Low Temperature and Specialty Gases

摘　　要：采用化学镀、氟涂料和真空离子镀(PVD)技术对涡旋干泵实施防护涂层,对转子和定子采用化学镀镍磷和氟涂料封闭技术制备防护涂层;对曲柄轴和曲柄销采用PVD技术制备Cr/CrN多层复合防护镀层。通过腐蚀试验表明,防护涂层可以长时间抵抗高腐蚀性气体的腐蚀,能够有效地提高涡旋干泵的使用寿命。Electroless plating, fluorine coating and vacuum ion plating （PVD） technology to implement protective coatings dry scroll vacuum pumps, the rotor and stator using electroless nickel phosphorus and fluorine coating technology to prepare sealed protective coatings ; crank shaft and crank pin using PVD technology to prepare Cr / CrN multilayer protective coat- ings. Corrosion test showed that by etching, a protective coating can be a long resistant to corrosive gases, can effectively improve the dry scroll vacuum pump life.

关 键 词：特种气体 真空泵 腐蚀 防护涂层 

分 类 号：TB752[一般工业技术—真空技术]