贝塞尔盒能量分析器规计量特性研究  

Metrological Characteristics of Ionization Gauge with Bessel Box Type Energy Analyzer

作　　者：习振华[1] 李菁桢 成永军[1] 冯焱[1] 张虎忠[1] 李得天[1] 

机构地区：[1]兰州空间技术物理研究所,兰州730000 [2]兰州大学物理科学与技术学院,兰州730000

出　　处：《真空科学与技术学报》2014年第8期781-786,共6页Chinese Journal of Vacuum Science and Technology

基　　金：国家杰出青年科学基金项目(No.61125101)资助课题

摘　　要：对贝塞尔盒能量分析器规灵敏度、稳定性、抽速、放气率及电子激励脱附（ESD）效应等计量特性进行研究。实验结果表明,N2、Ar、He对应的灵敏度分别为2.47×10-2,3.27×10-2,5.13×10-3Pa-1,且在10-9-10-3Pa范围内,表现出良好的线性;其短期稳定性及长期稳定性测试中,灵敏度表现出较好的一致性;抽速为10-5~10-4m3/s量级;放气率为8.1×10-11Pa·m3/s,降低了电离规自身出气对测量结果的影响,能够满足极高、超高真空测量的需要;ESD效应的研究表明,贝塞尔盒能量分析器能够有效地实现气相离子与ESD离子的分离,两种离子经加速后能量差约为40 eV。贝塞尔盒能量分析器规可以实现极高真空的精确测量。The metrological characteristics of axial symmetric transmission gauge, including the sensitivity factor, stability, pumping speed, outgassing rate, and electron stimulated desorption, were experimentally studied. The results include： i）with good linearity in the 10-9 × 10-3 Pa range,the sensitivity factors for N2,Ar, and He are 2.47×10-2,3.27×10-2 and 5.13×10-3Pa-1, respectively, and in the short-and long-time stability tests, the sensitivity factors remain constant; ii ）the pumping speed is as low as 10-5 - 10-4 m3/s; iii ）high accuracy in ultra-and extreme-high vacuum（UHV ＆ XHV） measurements because the degassing rate, 8.1 × 10-11 Pa·m3/s, little affects the accuracy; iv ）besselbox type energy analyzer is capable of effectively separating the ESD ions and gas phase ions, because of the 40 eV energy difference between the two types of ions after the acceleration. We suggest that the axial symmetric transmission gauge may do a good job in XHVmeasurement.

关 键 词：极高真空 贝塞尔盒能量分析器 电子激励脱附 灵敏度 出气率 

分 类 号：TB772[一般工业技术—真空技术]