氮化硅涂层改性石英颗粒辅助生长高效多晶硅  

Si_3N_4 Coated Silica Granule-Assisted High-Performance Multi-Crystalline Silicon

作　　者：周海萍[1] 尹长浩 张兆玉 钟根香 黄新明[1,2] 

机构地区：[1]南京工业大学材料科学与工程学院 [2]东海晶澳太阳能科技有限公司

出　　处：《特种铸造及有色合金》2014年第8期800-803,共4页Special Casting & Nonferrous Alloys

摘　　要：在坩埚底部铺设与硅熔体浸润性较好的石英颗粒辅助晶体生长可以生长出晶粒细小且分布均匀的柱状晶粒,从而提高了多晶硅电池的光电转换效率。研究了氮化硅涂层改性石英颗粒对多晶硅生长和脱模的影响。结果表明,氮化硅涂层改性石英颗粒辅助生长可以获得晶粒细小且分布均匀的柱状晶粒,从而降低多晶硅缺陷密度,提高多晶硅质量,同时实现石英颗粒与晶体硅之间的自发分离,避免多晶硅与石英颗粒间因粘结而产生的应力问题。Silica granules have good wettability to silicon melt, and could be used as seeds to grow fine and well-distributed columnar silicon grains for high-performance multi-crystalline silicon （MC-silicon） related with high conversion efficiency of the solar cells. Si3 N4 was coated to the silica granules for improving the MC-silicon growth and ingot releasing effect. It is found that the Si3N4 coating on the silica granules is helpful for obtaining fine and uniformly distributed columnar grain to decrease the defect density and improve the quality of multi-crystalline silicon. In addition, the detachment of the silica granules from silicon ingot is realized easily to eliminate the stress from the bonding of multi-crystalline sili- con with silica granules.

关 键 词：高效多晶硅 氮化硅涂层 石英颗粒 

分 类 号：O613.72[理学—无机化学] TM914.4[理学—化学]