基于气体润滑支承技术的大承载精密一维调整技术研究  

Development of Precision One-Dimensional Adjustment Worktable Based on Aerostatic Bearing Technology

作　　者：侯茂盛[1] 季林[1] 刘恩涛[1] 田艳荣[1] 马飞[1] 赵维谦[1] 

机构地区：[1]北京理工大学光电学院,精密光电测试仪测试及技术北京市重点实验室,北京10008i

出　　处：《光学学报》2014年第13期210-214,共5页Acta Optica Sinica

基　　金：国家863计划（2012AA040507）

摘　　要：为实现光学和机械测量中对大型被测件位姿的一维高精度测量和调整，发明研制了基于空气静压轴承技术的高精度大承载一维调整装置，并对该一维调整系统的调倾性能进行测定和研究。阐述了基于空气静压轴承技术的调倾工作台的构成及工作原理。利用三维空间坐标变换得到调倾操作的数学模型，并由此得出了驱动器位移与倾斜角度间的关系。采用光电自准直仪构建测量系统，得出基于空气静压轴承技术的大范围高精度工作台倾斜调整的分辨力。分析了测量系统的误差，给出调倾装置的性能评价。实验结果表明：在50kg负载下，调倾操作的分辨力为1．2″，倾斜调整范围± 1°。发明研制的系统满足光学和机械测量中对调整工作台的高精度、高分辨力、大调整范围、无摩擦、易驱动和高承载刚度等要求。To achieve the high-precision one-dimensional adjustment of large surface under test in optical and mechanical measurements, a novel worktable based on the aerostatic bearing technology is developed. In the worktable, pitch or tilting motion is achieved by a cambered surface of aerostatic bearing and micro-displacement actuators, and the relationship between the angle of one-dimensional adjustment and the displacement of actuators is analyzed. Furthermore, by using an electronic autocollimator, the resolution of one-dimensional adjustment worktable is measured. Errors of the one-dimensional adjustment system are analyzed and the performance evaluation of the system is given. The experimental results show that the worktable has a pitch or tilting adjustment resolution of 1.2＂, adjustment range of ± 1° and good stability with 50 kg load. The developed one-dimensional adjustment worktable can satisfy the requirements of higher precision, high resolution, large adjustment range, frictionless, high load stiffness, stabilization and small driving force.

关 键 词：测量 精密一维位姿调整 气体静压轴承技术 工作台 

分 类 号：TH741[机械工程—光学工程]