真空器件用玻璃——可伐管状封接工艺研究  

Study of glass-kovar tubular sealing technique for vacuum devices

作　　者：马迎英[1] 欧丽[1] 梁莉[1] 张强[1] 李正林[1] 陶青[1] 程焰林[1] 王远[1] 

机构地区：[1]中国工程物理研究院电子工程研究所,四川绵阳621900

出　　处：《真空》2014年第5期47-50,共4页Vacuum

基　　金：中国工程物理研究院科学技术发展基金(2014B0401060);电子工程研究所基金(426010401)

摘　　要：玻璃——可伐管状封接是利用可伐表面氧化层与熔融的电真空钼族玻璃很好的浸润的一种管状匹配封接,因其良好的气密性及较高封接强度,在真空器件的科研及生产中有较广泛的使用。本文将真空器件玻璃——可伐管状封接气泡产生原因归纳为三类。结合大量工艺试验和相关资料,逐一对应提出了具体的分析及解决措施。通过三维数字显微镜对比改进前后的封接效果,证明以上措施可以有效避免真空器件用玻璃——可伐封接汽泡问题的产生,进一步保障了真空器件的科研生产工作。Glass-kovar tubular sealing, which is based on the soakage between the oxide layers on kovar and melted molybdenum group glass, is widely used in vacuum devices. For some reasons, bubbles were formed in the sealing process, therefore reduces the tightness and sealing intensity of vacuum devices. Combined with experiments and correlated data, the reasons of the generation of three types of bubbles were analyzed respectively, and the methods and steps for resolving these problems were provided. Through comparing the sealing effects before and after improvement by optical microscope, the solutions were further proved to be effective, which provided a strong guarantee for the research and production of vacuum devices.

关 键 词：气泡 封接 烧制 可伐 

分 类 号：O569[理学—原子与分子物理]