工程型高温度梯度单晶炉研制  

Development of engineering type high temperature gradient single crystal furnace

作　　者：佟勃勇 闫胜斌 张以忱[2] 

机构地区：[1]锦州锦开电器集团有限责任公司,辽宁锦州121013 [2]东北大学机械工程与自动化学院,辽宁沈阳110004

出　　处：《真空》2014年第5期59-63,共5页Vacuum

摘　　要：介绍了新型工程型高温度梯度单晶炉研制开发的项目背景,主要研发内容及技术指标,创新性和达到的技术水平,产品采标,应用领域及应用情况,产品经济和社会效益情况,对推动产业发展或行业技术进步的意义。In this work. the research backgroud of novel engineering type high temperature gradient single crystal furnace was introduced. The main research content, key technical indicators, innovativeness and state of the art were investigated. The information was also provided in standard adoption, application fields and status, econonmic and social benefits, as well as the significance in industry development and technology improvement.

关 键 词：工程型高温度梯度单晶炉 高温度梯度两区加热 计算机程序 PLC控制 

分 类 号：TF01[冶金工程—冶金物理化学] TB79[一般工业技术—真空技术]