凸非球面辅助面的背向零位检验分析  

Convex asphere back null compensation testing with auxiliary surface

作　　者：姚劲刚 胡文琦[1] 叶璐[1] 郑列华[1] 

机构地区：[1]中国科学院上海技术物理研究所,上海200083

出　　处：《量子电子学报》2014年第5期520-524,共5页Chinese Journal of Quantum Electronics

基　　金：国家重点基础研究发展计划资助(2011CB013206)

摘　　要：在现代光学检测中,凸非球面的检测一直是一个难点。辅助面的背向零位检测方法,从三级像差理论出发,通过计算非球面的法距差,来探讨辅助面对凸非球面法距差的补偿校正能力。这种检验方法可用于偏心率-1/n^2<e^2<1/n^2的凸非球面。辅助面有两个作用,其一为将实体非球面的球心引入到空气中;其二则为辅助面与凸非球面的组合可以补偿凸非球面的法距差。通过理论分析与Zemax编程计算得出当-0.5<e^2<0.5时非球面的RMS值均优于λ/30.在工程实际应用中,通过此方法检测的凸非球面波前误差优于λ/100。可以得出辅助面对凸非球面的法距差具有一定的补偿能力这一结论。Convex aspheric surface testing is very difficult. In order to obtain better wavetront error, a method including back null compensation with auxiliary surface was proposed. This method, based on third-order aberration theory, the ability of auxiliary surface to compensate the normal aberration of convex asphere with eccentricity of -1/n2 〈 e2 〈 1/n2 was investigated. There are two functions of the auxiliary surface. One is to make the center of the asphere locate in the air. The second is using the combination of auxiliary surface and convex aspheric surface to compensate the normal aberration of convex asphere. When -0.5 〈 e2 〈 0.5, the value of RMS, which is calculated by theory and Zemax, is better than/V30. Furthermore, the surface figure accuracy can be practically reach x/100 by using above testing method. In conclusion, the back null compensation with auxiliary surface testing is able to achieve better wavefront error.

关 键 词：几何光学 辅助面补偿 凸非球面检测 

分 类 号：O435[机械工程—光学工程]