单晶金刚石微观性能的纳米压入测量研究  

Microscopic properties of a single-crystalline diamond by nano-indentation measurement

作　　者：魏齐龙[1] 李晓媛[1] 岳晓斌[1] 张晓峰[1] 雷大江[1] 刘波[1] 

机构地区：[1]中国工程物理研究院机械制造工艺研究所,四川绵阳621900

出　　处：《金刚石与磨料磨具工程》2014年第4期25-30,共6页Diamond & Abrasives Engineering

基　　金：国家重大科技专项"强激光光学元件超精密制造关键装备研制"(2013ZX04006011);国家自然科学基金项目(51202228)

摘　　要：研究单晶金刚石的微观机械性能,可为金刚石工具的研磨和使用性能评价提供技术依据。提出以纳米压入技术研究单晶金刚石微观尺度机械性能,分析了纳米压入技术的主要原理及其技术特点,进行了纳米压入测量实验并分析了各种因素的影响。研究表明:采用10mN的ADO载荷和小于10mN的最大压入载荷对单晶金刚石{100}晶面进行纳米压入测量,可显著减小甚至避免金刚石压头的变形和损伤,获得有效的压入曲线及数据;但在多次测量后会出现金刚石压头的累积钝化。基于测量过程和结果的分析,提出了提高测量有效性的方法。It would provide technological basis for lapping and using properties of single-crystalline diamond tools by researching their microscopic mechanical properties.Nano-indentation technology was introduced to study microscopic mechanical properties of single-crystalline diamonds.Main theory and technological characteristics of nano-indentation were analyzed.Nano-indentation was conducted on a diamond,and influences of various factors were discussed.It was found that nano-indentation on the{100}crystalline plane of the diamond with ADO load 10 mN and the maximal indentation load less than10 mN,could reduce and even avoid deformation and damage of indenters,and produce effective curves and data.But in repeating indentation measurements,indenters would become blunt gradually.Methods were brought forward to improve effectiveness of indentation measurement based on analysis of measuring course and results.

关 键 词：单晶金刚石 微观性能 纳米压入 载荷 压头钝化 

分 类 号：TQ164[化学工程—高温制品工业]