基于光纤双波干涉的台阶高度在线高精度测量研究  

High precision on-line measurement of step height based on fiber dual-wavelength interferometry

作　　者：马森[1] 谢芳[1] 王韵致 陈亮[1] 

机构地区：[1]北京交通大学理学院物理系光电检测研究所,北京100044

出　　处：《光电子．激光》2014年第9期1749-1753,共5页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金(50975022);北京市自然科学基金(3132033)资助项目

摘　　要：提出一种基于双波干涉的台阶高度光纤在线干涉测量系统。利用光纤光栅(FBG)只反射布拉格波长的特性,使两个波长同时并独立地工作于同一个光纤干涉测量系统中,每个波长的干涉信号分别并同时被探测,将测量量程扩大为半合成波波长。利用反馈电路补偿环境干扰对光纤干涉测量系统的影响,使光纤干涉测量系统适合于在线测量。本光纤干涉测量系统可测量的最大台阶高度达1mm,测量分辨率小于1nm。An optical fiber dual-wavelength interferometric system,which is suitable for on-line measurement of step heights with high precision and without the need of each wavelength working individually in sequence to perform the measurement,is proposed. By employing the characteristic of a fiber Bragg grating of reflecting Bragg wavelength, two different wavelengths are working simultaneously and independently in the same optical fiber interferometric system,and two interferometric signals of each wavelength can be detected simultaneously and respectively. The measurement range is expanded to half of a synthetic wavelength. The system is stabilized by a feedback loop which compensates the influence induced by the environmental disturbances, and thus the system is robust enough for on-line measurement. The system is capable of measuring step heights as large as 1 mm and the measurement resolution is less than 1 nm.

关 键 词：光纤测量 干涉测量 台阶高度测量 在线测量 

分 类 号：TP212.14[自动化与计算机技术—检测技术与自动化装置]