一种基于位置敏感器相位检测的振动测量方法  

A vibration measuring method based on phase detection by position sensitive detector

作　　者：王夏菁[1] 郑佩祥[2] 李超[1] 徐启峰[1] 

机构地区：[1]福州大学电气工程与自动化学院,福建福州350108 [2]福建省电力有限公司,福建福州350003

出　　处：《光电子．激光》2014年第9期1765-1770,共6页Journal of Optoelectronics·Laser

摘　　要：针对微机械系统和精细加工技术中现有的振动测量方法存在易受电磁干扰、动态和线性范围窄等诸多问题,本文提出了一种基于一维位置敏感器(PSD)相位检测的振动测量方法,通过激光三角法将被测物体的振动信号转换为光斑在PSD的位置变化,PSD两电极输出的电流相差信号经PSD相位法的信号处理电路转换为与光斑位置成线性关系的直流电压信号,由此确定光斑的位置变化,进而测量物体的振动,且实时信号可以通过示波器或在上位机界面中显示。本文实验测量的平均相对误差为0.89%,最大误差为1.75%,线性度优于1.2%,实现了振动的高精度、高线性度和不受电磁干扰的测量。Vibration measurement plays an important role in micro mechanical system and fine processing technology. However,there are some problems in the existing measuring methods of vibration. A vibration measuring method based on one dimensional position sensitive detector （PSD） is put forward in this paper. The vibration signals of the object are converted to the position of the light changes through laser triangulation. The current signals with phase difference which are output from the two electrodes of PSI） are converted to a direct current voltage signal which is linear with the location of facula through the signal processing circuit of PSD phase method to determine the change of facula location, and then the vibration of objects is measured. Real-time signal is measured and displayed through the osdlloscope or it is handled and displayed in the personal computer interface. The average relative error of the experimental frequency measurement in this work is 0.89% ,the maximum error is 1.75% ,and the linearity is better than 1.2 %, which realize the vibration measurement with high accuracy, high linearity and immunity to electromagnetic interference. It is able to meet the requirements of industrial non-contact measurement.

关 键 词：一维位置敏感器(PSD) 光学三角法 相位检测法 振动测量 

分 类 号：TN29[电子电信—物理电子学]