X射线定向仪衍射角度自动测量与采集系统研制  

Development of Automatic Measurement and Acquisition System of X-ray Orientator Diffraction Angle

作　　者：孙世君[1] 

机构地区：[1]辽东学院机电学院,辽宁丹东118003

出　　处：《辽东学院学报（自然科学版）》2014年第3期185-188,共4页Journal of Eastern Liaoning University:Natural Science Edition

摘　　要：在传统X射线晶体定向仪的基础上,设计了一种可以通过自动寻峰技术,实现晶体衍射角度测量、采集、存储和导出的自动化测量系统。有效地解决了传统定向仪手动测量过程中的人为误差,并极大地提高了在晶片筛选中的一致性。试验及用户使用报告证明,使用该系统的X射线定向仪,测量误差可优于±10″,远低于传统定向仪的±30″允许误差。可广泛应用于单晶的晶片筛选及硅单晶的切割定向。An automatic measurement system to realize the storage and export through the automatic peak search technology oped. By such a system, the error happened in manual operation crystal diffraction angular surveying, acquisition, for traditional X -ray crystal orientator was devel- of traditional orientator can be eradicated and the uniformity in chip screening process can be greatly improved. The results of experiments and user＇ s reports show that the measurement error of the revised orientator can be superior to ± 10 seconds, far below the permissible ±30 seconds error of the traditional orientator.

关 键 词：X射线 衍射 晶体 V/F变换 自动寻峰 PLC 触摸屏 

分 类 号：TH744[机械工程—光学工程]