ITO玻璃表面电化学沉积氧化锌薄膜及其润湿性研究  

Preparation and Wettability Study of Zinc Oxide Films by Electrochemical Deposition on ITO Glass

作　　者：梅芳[1] 弓满锋[1] 

机构地区：[1]湛江师范学院物理学院,广东湛江524048

出　　处：《湛江师范学院学报》2014年第3期57-62,共6页Journal of Zhanjiang Normal College

基　　金：广东省自然科学基金项目(S2013010012107);湛江市科技项目(2013B01109);湛江师范学院科研创新团队项目(ZSIRT13006)

摘　　要：ITO导电玻璃具有许多优越的特性,如高透过率、高导电性、无毒无害以及优良的化学稳定性,因而广泛应用于半导体和传感器等电子工业领域,可作为基体材料应用在IT仪器或传感器中.本文采用电化学沉积法在ITO导电玻璃表面沉积得到氧化锌薄膜结构,通过SEM观察纳米氧化锌薄膜表面形貌,用XRD分析薄膜的成分和晶体生长情况,用ZYGO激光干涉仪测量了其表面粗糙度,用接触角测量仪测量膜层表面与水的接触角.综合上述实验结果对比分析了ITO导电玻璃表面有无氧化锌薄膜时表面形貌的变化,及其对表面润湿性的影响.结果表明:在ITO导电玻璃表面,可以通过电化学沉积法得到结构完整且表面相对平整的纳米尺度ZnO晶体结构,并且该结构存在择优取向性,导致其表面粗糙度有所下降,但是却能够使得水滴在其表面表现为疏水性的特性.ITO glass is of global interest nowadays in semiconductor and sensor application.It has al-ready been an excellent substrate for constructing various IT devices and sensors,because of its electronics such as fast electron transfer kinetics,non-toxicity,chemical stability,and high electron communication features.In the paper,the film with ZnO nanostructures modified ITO glass was fabricated by electro-chemical deposition.SEM,XRD and ZYGO were used to characterize the properties of ZnO on ITO. Then,the contact angles were measured to characterize and compare the wettability of ITO glass and its modified ITO glass by zinc oxide films.The above experimental results were synthetically studied,the surface morphology of ITO conductive glass （with ZnO thin film on its surface and without）and its influ-ence on surface wettability were comparatively analysis.The results show that the relatively perfect and smooth nanoscale ZnO crystal structure can be obtained by electrochemical deposition on the surface of the ITO conductive glass,and the structure shows preferred orientation characteristic.Though depositing nanoscale ZnO film may cause the surface roughness decreased,but it can changes the hydrophobic proper-ties of the ITO conductive glass surface.

关 键 词：氧化铟锡 氧化锌 电化学沉积 接触角 

分 类 号：TB43[一般工业技术]