微机械陀螺仪的新进展及发展趋势  

Study on New Development and Future Trends of Micromachined Gyroscopes

作　　者：许昕[1] 何杰[1] 王文[1] 卜继军[1] 

机构地区：[1]中国电子科技集团公司第26研究所,重庆400060

出　　处：《压电与声光》2014年第4期588-595,共8页Piezoelectrics & Acoustooptics

摘　　要：微机械陀螺仪是陀螺技术和微电子机械系统(MEMS)技术结合产生的新一代惯性器件。根据其工作原理和采用材料的不同,微机械陀螺可分为硅基微机械振动陀螺(Si-MVGs)、微机械压电振动陀螺(PVGs)和悬浮转子式微机械陀螺等。该文介绍了微机械陀螺仪的主要参数指标和应用,对硅基微机械振动陀螺(Si-MVGs)、微机械压电振动陀螺(PVGs)和悬浮转子式微机械陀螺的最新研究进展作了综合性报道,讨论了微机械陀螺未来的发展趋势。The micromachined gyroscopes are a new generation inertial devices which combined the gyro technologies and MEMS technology. Based on the different operating principles and materials, micromachined gyroscopes can be mainly categorized into Si-based micromachined vibrating gyroscopes （Si-MVGs）, micromachined piezoelectric vibrating gyroscopes（PVGs）,micromachined gyroscopes with levitated rotor etc. The main parameters and applications of the micromachined vibrating gyroscopes are introduced in this paper. The current developments of the various micromachined gyroscopes have been overviewed and the future trends of micromachined gyroscopes are also discussed.

关 键 词：硅基微机械陀螺 微机械压电振动陀螺 石英微机械陀螺 

分 类 号：U666.1[交通运输工程—船舶及航道工程]