应用于高性能光学薄膜表征的光热光声检测技术  被引量:6

Optical-thermal and optical-acoustics detecting techniques applied for the characterizations of high performance optical thin films

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作  者:武潇野 张立超[1] 时光[1] 

机构地区:[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033

出  处:《中国光学》2014年第5期701-711,共11页Chinese Optics

基  金:国家科技重大专项资助项目(No.2009ZX02205)

摘  要:本文介绍了光热与光声探测技术的基本原理,结合光学薄膜的吸收测试、光学薄膜的激光辐照特性表征、激光损伤特性表征以及光学薄膜的机械性质表征等各种具体应用,对激光量热法、光热偏转法、表面声波法等典型的光热、光声检测方法进行了分析;阐述了这些方法的测试原理以及各自优势与不足。介绍了该领域利用这些方法取得的一些成果,并就光声光热检测技术的发展趋势做了展望。In this paper , the basic principle of the optical-thermal and optical-acoustics detecting methods is reviewed.The common optical-thermal and optical-acoustics detecting methods are described .Combined with specific applications such as absorption test of optical films , characterization of laser irradiation and laser dam-age to the thin films and characterization of the mechanical properties of thin films , some typical detecting methods are analyzed including laser calorimetry technique , photothermal deflection technique , surface acous-tic waves and so on .The advantages and disadvantages of these methods are indicated .Finally, some achieve-ment in the field by these methods are summarized , and the prospect of these methods is presented .

关 键 词:光热方法 光声法 激光量热法 激光辐照 检测技术 

分 类 号:O484.41[理学—固体物理]

 

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