基于氧化物的0.8～1.7μm和3.7～4.8μm硬质宽带红外增透膜研制  

Fabrication of hard infrared anti-reflection coating with broadband in the wavelength of 0.8-1.7 μm and 3.7-4.8 μm based on oxide material

作　　者：王彤彤[1,2] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院光学系统先进制造技术重点实验室,吉林长春130033

出　　处：《中国光学》2014年第5期816-822,共7页Chinese Optics

基　　金：国家自然科学基金资助项目(No.60478035)

摘　　要：从实际应用出发，在0°入射的条件下，在ZnS基底上针对0.8～1.7μm和3.7～4.8μm两个红外波段，设计并制备了双波段红外增透膜。论述了材料选择、膜系设计和制备方法，最终使用等离子辅助沉积技术在ZnS窗口上制备出双波段红外增透膜，透过率及环境测试结果表明：在0.8～1.7μm波段双面平均透过率大于95％，在3.7～4.8μm波段双面平均透过率大于96％。膜层结合牢固并有良好的耐摩擦性能。This paper demonstrates the design and fabrication of the dual-band antireflection coating in 0.8-1.7 μm and 3.7-4.8μm wavelength region at 0 °incident angle on the ZnS substrate based on oxide materi-als.The choosing on evaporation materials , optical coating design and fabrication method , et al.are discussed in detail .The dual-band IR antireflection coating has been successfully produced by Plasma Ion Assisted Dep-osition（ PIAD） technique on both side of the ZnS substrate .Transmittance and environment test results show that the average transmittance is larger than 95%during 0.8-1.6μm wavelength region and larger than 96%during 3.7-4.8 μm wavelength region , respectively .The firm adhesion and good tribology ability have been obtained referring to the general specification for optical coatings .

关 键 词：红外增透膜 硫化锌 等离子辅助 双波段增透膜 

分 类 号：O484[理学—固体物理] TN304[理学—物理]