有机气相喷印系统的开发和研究  

Research and Development of Organic Vapor Jet Printing System

作　　者：彭文佳 张鸿海[1,2] 舒霞云[1,2] 邱阳[1,2] 

机构地区：[1]华中科技大学机械学院,湖北武汉430074 [2]武汉光电国家实验室微光机电系统研究部,湖北武汉430074

出　　处：《机床与液压》2014年第17期5-8,共4页Machine Tool & Hydraulics

基　　金：国家自然科学基金资助项目(51175204)

摘　　要：为了满足高分辨率、大尺寸、高发光效率的有机电致发光器件(OLED)的制作需求,提出了一种利用印章式有机气相喷射技术(OVSJP)来进行图形化的新方法。阐述了该方法的基本原理、实验装置和初步的实验结果。利用直径80μm的单口硅喷嘴,成功实现了阵列点阵、等距线条等基本图形的制作。研究了主要控制参数对点阵直径、线条宽度和成型质量的影响。结果表明:印章式有机气相喷射技术是一种有效的OLED有机层的制作技术,能够满足大尺寸的OLED工业化生产的需求,是目前国内制作OLED的一种新的工艺方法。In order to satisfy needs in producing Organic Light-Emitting Diode（OLED） devices with high resolution,large size and high luminous efficiency,a new method for pattern making is come up with a technology using organic vapor stamp jet printing（OVSJP）. The fundamentals of this method were explained,as well as to the experimental devices and preliminary results. Some basic patterns of spots,arrays and isometry lines were made successfully by using single silicon jet nozzle with diameter of 80 um. Main control parameters were studied to investigate their effects on the diameter of the spots,the width of the lines and pattern making quality.The results show that OVSJP is an effective technology to fabricate the organic layers of the OLED devices. It can meet the needs of industrial production of fabricating large size OLED devices,and is a new technology method in domestic fabricating OLED at present.

关 键 词：有机电致发光器件 喷射 图形化 有机薄膜层 

分 类 号：TH16[机械工程—机械制造及自动化]