钼管靶材的挤压理论与组织性能分析  

EXTRUSION THEORY AND ANALYSIS ON MICROSTRUCTURE AND PROPERTIES OF MOLYBDENUM TUBE TARGET

作　　者：朱琦[1] 王林[1] 杨秦莉[1] 王娜[1] 

机构地区：[1]金堆城钼业股份有限公司技术中心,陕西西安710077

出　　处：《中国钼业》2014年第4期50-53,共4页China Molybdenum Industry

摘　　要：首先采用粉末冶金法制备了钼管坯或钼棒坯,然后通过挤压的加工方式得到满足溅射靶材密度要求的成品钼管靶。通过对管靶的挤压理论分析,得出钼管靶材的挤压工艺参数,包括挤压力(即挤压比)、挤压温度、挤压速度以及润滑剂等,并通过挤压前后组织和性能测试对比结果,得出挤压后的钼管靶材性能优异且能满足客户要求。Molybdenum tube or molybdenum billets were successfully prepared by powder metallurgy,and then the finished molybdenum tube targets were obtained by extrusion processing mode which meet the density requirements of the sputtering target.According to theoretical analysis of the extrusion molybdenum tube target,the extrusion process parameters of the molybdenum tube target were obtained ,including extrusion pressure （i.e.,extrusion ra-tio）,extrusion temperature,extrusion speed.The microstructure and properties after extrusion test results,the per-formance of extrusion molybdenum tube target were excellent and could meet customer requirements.

关 键 词：粉末冶金 挤压 钼管靶材 

分 类 号：TG379[金属学及工艺—金属压力加工]